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WHITE LIGHT INTERFEROMETRIC MICROSCOPE SYSTEM

Nikon BW Series

Accurate sub-nano-surface profiler with non-contact measurement

Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

KEY BENEFITS

Superior measurement performance

  • Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process
  • Enables measurements with the same height resolution in a wide range of magnifications
  • Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters
  • Captures both an all-in-focus image and a surface height image

Wide range of observation methods

  • The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible
Nikon Nikon
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SiC Wafer: Sub-nano-level measurement in a wide range of magnifications

Type: BW-D501 system, Subject: Silicon Carbide (SiC) Wafer

Silicon-Carbide-SiC-Wafer-2.5x
Sa 0.483nm, Sq 0.645nm, Sz 7.460nm
Silicon-Carbide-SiC-Wafer-5x
Sa 0.302nm, Sq 0.401nm, Sz 11.187nm
Silicon-Carbide-SiC-Wafer-10x
Sa 0.144nm, Sq 0.545nm, Sz 121.859nm
Silicon-Carbide-SiC-Wafer-50x
Sa 0.391nm, Sq 0.495nm, Sz 3.934nm
Silicon-Carbide-SiC-Wafer-100x
Sa 0.306nm, Sq 0.398nm, Sz 3.264nm
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Nano-level measurement of razor-edge with high-magnification lens

Subject: Razor-edge

BW nano-level measurement of razor-edge
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Surface roughness of paper (Synthetic, Plain, Gloss, Matte)

Surface roughness of synthetic paper

Surface roughness of synthetic paper

Surface roughness of gloss paper

 Surface roughness of gloss paper

Surface roughness of plain paper

Surface roughness of plain paper

Surface roughness of matte paper

Surface roughness of matte paper
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Surface roughness of ceramics

BW Surface roughness of ceramics
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Precise surface measurements for micrometer-range rough surfaces

Type: BW-A501 system, Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition, Photos courtesy of Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering

BW Precise surface measurement
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IC package: Micrometer-range measurement in a wide range of magnifications

BW IC Package Micrometer range measurement in a wide range of magnifications
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Height calibration with the NIST-certified VLSI standard

BW Height calibration with the NIST-certified VLSI standard
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BW-D501 system

BW-D501 system
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Nikon on johtava optisten instrumenttien valmistaja. Yhtiö on perustettu Japanissa vuonna 1917. Yli 90-vuotisen toimintansa aikana Nikon on kehittänyt edistyneitä ja tinkimättömän laadukkaita mikroskooppeja ja muita optisia laitteita.
Tänä päivänä Nikon Metrology tarjoaa laajan tuotevalikoiman mikroskopia- ja mittalaitteissa.
Nikon
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MITTAMIKROSKOOPITVIDEOMITTALAITTEETPROFILOMETRIT
Nikon MM-200 Nikon NEXIV VMR-3020 Nikon BW-S507
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